Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2007-05-01
2007-05-01
Ghyka, Alexander (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S151000, C257SE51007
Reexamination Certificate
active
10948341
ABSTRACT:
The invention related to a process for improving carrier mobility of organic semiconductor, comprising the steps of: forming a gate on a substrate; forming an insulator layer on the substrate and the gate; coating polyimide on the insulator layer to form an interlayer; forming an active layer on the interlayer; and forming a source and a drain.
REFERENCES:
patent: 6433359 (2002-08-01), Kelley et al.
Ho Jia-Chong
Hu Tarng-Shiang
Huang Liang-Ying
Lin Wei-Ling
Akin Gump Strauss Hauer & Feld & LLP
Ghyka Alexander
Industrial Technology Research Institute
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