Process to improve carrier mobility of organic semiconductor

Semiconductor device manufacturing: process – Having organic semiconductive component

Reexamination Certificate

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C438S151000, C257SE51007

Reexamination Certificate

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10948341

ABSTRACT:
The invention related to a process for improving carrier mobility of organic semiconductor, comprising the steps of: forming a gate on a substrate; forming an insulator layer on the substrate and the gate; coating polyimide on the insulator layer to form an interlayer; forming an active layer on the interlayer; and forming a source and a drain.

REFERENCES:
patent: 6433359 (2002-08-01), Kelley et al.

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