Process timer monitor

Details Process timer monitor Process timer monitor

1997-01-22

1999-08-24

Le, Thien Minh

Registers

Coded record sensors

Particular sensor structure

G06K 710

Patent

active

059427396

ABSTRACT:
A process run card encoded with bar-code information and providing controllers with scanners which can scan the bar-code information and configure the controller accordingly is disclosed. Such a system advantageously provides a semiconductor manufacturing system controller which minimizes or reduces the problems associated with having to reprogram controllers for various lots. Such a system also provides a mechanism for preventing the erroneous re-processing of semiconductor material which has already received a timed processing step.

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patent: 5537325 (1996-07-01), Iwakiri et al.
Master.RTM. Bar Code Multi-Interface Controllers User Manual, Copyright Feb. 1993; pp. A-H thru 1-92.
Percon Series 10 Complete Parameter Listing and Bar Codes, May 20, 1992, no p. #'s.
Master.RTM. Bar Code Multi-Interface Controller; Quick and Simplified Activation of the Keyboard Wedge Mode; no p. #'s, No date.
Opticon, "MR-1100 Hand-Held CCD Scanner with 3 DOF", pp. 1-2, No date.
Santa Clara Plastics, "Model 3152-1400A Sub-Ambient System", Nov. 21, 1988, pp. 1-1 thru 10-9.

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