Process system with integrated gas storage and delivery unit

Details Process system with integrated gas storage and delivery unit Process system with integrated gas storage and delivery unit

1996-11-01

1998-01-13

Spitzer, Robert

Gas separation: processes

Solid sorption

Including reduction of pressure

95127, 95902, 96130, 96143, 96147, 206 07, B01D 53047

Patent

active

057074240

ABSTRACT:
A process system with an integrated gas storage and delivery unit comprising an adsorption-desorption apparatus, for storage and dispensing of a gas wherein the gas is dispensed by pressure differential desorption of the sorbate gas from the sorbent material. A motive fluid driver, e.g., a pump, blower, compressor, eductor, or the like, is arranged for flowing the dispensed gas to a gas-utilizing unit, such as an ion-implant unit, wastewater treatment unit, gas-liquid contacting chamber, chemical vapor deposition reactor, gas laser assembly, etc.

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