Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-08-08
2011-12-20
Lee, Hwa (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
08081316
ABSTRACT:
A system, process and software arrangement are provided to determine at least one position of at least one portion of a sample. In particular, information associated with the portion of the sample is obtained. Such portion may be associated with an interference signal that includes a first electromagnetic radiation received from the sample and a second electro-magnetic radiation received from a reference. In addition, depth information and/or lateral information of the portion of the sample, may be obtained. At least one weight function can be applied to the depth information and/or the lateral information so as to generate resulting information. Further, a surface position, a lateral position and/or a depth position of the portion of the sample may be ascertained based on the resulting information.
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de Boer Johannes Fitzgerald
Park Boris Hyle
Dorsey & Whitney LLP
Lee Hwa
The General Hospital Corporation
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