Process system and device for transporting substrates

Details Process system and device for transporting substrates Process system and device for transporting substrates

2008-01-15

2008-01-15

Bidwell, James R. (Department: 3651)

Conveyors: power-driven

Conveyor section

Load propelled as the reactive means in a linear motor or...

C414S749200

Reexamination Certificate

active

11507320

ABSTRACT:
A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least two of the actuators are disposed at a distance from each other and define at least one pair of actuators with an associated gap area formed therebetween. An active magnetic bearing of the bearing rotor is provided in the gap area.

REFERENCES:
patent: 5086729 (1992-02-01), Katagiri
patent: 5170714 (1992-12-01), Katagiri
patent: 5284411 (1994-02-01), Enomoto et al.
patent: 5398804 (1995-03-01), Ecker et al.
patent: 6045319 (2000-04-01), Uchida et al.
patent: 6361268 (2002-03-01), Pelrine et al.
patent: 102 47 909 (2004-04-01), None
patent: 0 346 815 (1989-12-01), None

Affiliated with

Also associated with

Rating

Process system and device for transporting substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process system and device for transporting substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process system and device for transporting substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3909950