Process system and device for transporting substrates

Details Process system and device for transporting substrates Process system and device for transporting substrates

2008-01-15

2008-01-15

Bidwell, James R. (Department: 3651)

Conveyors: power-driven

Conveyor section

Load propelled as the reactive means in a linear motor or...

C414S749200

Reexamination Certificate

active

07318517

ABSTRACT:
A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least two of the actuators are disposed at a distance from each other and define at least one pair of actuators with an associated gap area formed therebetween. An active magnetic bearing of the bearing rotor is provided in the gap area.

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patent: 102 47 909 (2004-04-01), None
patent: 0 346 815 (1989-12-01), None

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