Process state detector, semiconductor sensor and display device

Details Process state detector, semiconductor sensor and display device Process state detector, semiconductor sensor and display device

1996-12-19

2000-01-25

Oen, William L.

Measuring and testing

Fluid pressure gauge

Diaphragm

73708, G01L 906, G01L 1904

Patent

active

060167068

ABSTRACT:
In a multiple function type differential pressure sensor including a semiconductor chip having a differential pressure detector for detecting a differential pressure, temperature detector for detecting a temperature, and static pressure detector for detecting a static pressure provided on a semiconductor substrate of a single chip, two or more pairs of differential pressure detectors means are incorporated, and a difference between outputs of the two or more pairs of differential pressure detectors is fetched out.

REFERENCES:
patent: 5259248 (1993-11-01), Ugai et al.

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