Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-10-11
2000-01-18
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
G01R 3126
Patent
active
060160624
ABSTRACT:
One embodiment of the instant invention is a test structure (FIGS. 1, 7 and 8) for determining the effect of various process steps on a plurality of devices with regards to charge-induced damage, the test structure comprising: the plurality of devices (device 10 of FIG. 1 and devices of FIGS. 7 and 8), each of the devices includes a plurality of device levels and device structures; a plurality of antennas (antenna 11 of FIG. 1, antennas of FIGS. 7 and 8) for receiving charged particles emitted during a process step, each of the antennas connected to a corresponding portion of the plurality of devices and wherein the antenna and the corresponding portion of the plurality of devices has a perimeter ratio and an antenna ratio; and wherein the perimeter ratios and the antenna ratios are different for different portions of the plurality of antennas and their corresponding portion of the plurality of devices so that the effect of the various process steps with regards to charge-induced damage can be determined.
REFERENCES:
patent: 4542340 (1985-09-01), Chakravarti et al.
patent: 4638341 (1987-01-01), Baier et al.
patent: 4672314 (1987-06-01), Kokkas
patent: 4676761 (1987-06-01), Poujois
patent: 4767496 (1988-08-01), Hieber
patent: 4789825 (1988-12-01), Carelli et al.
patent: 4994736 (1991-02-01), Davis et al.
patent: 5100829 (1992-03-01), Fay et al.
patent: 5239270 (1993-08-01), Desbiens
patent: 5304925 (1994-04-01), Ebina
patent: 5451292 (1995-09-01), Shimamune et al.
patent: 5548224 (1996-08-01), Gabriel et al.
patent: 5598009 (1997-01-01), Bui
patent: 5661330 (1997-08-01), Aimi et al.
Krishnan Srikanth
Nicollian Paul
Donaldson Richard L.
Hoel Carlton H.
Karlsen Ernest F.
Texas Instruments Incorporated
Valetti Mark A.
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