Process of using microwave deposition of metal oxide onto an...

Plastic and nonmetallic article shaping or treating: processes – Formation of solid particulate material directly from molten... – Coated particles

Reexamination Certificate

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C264S010000, C264S430000, C264S489000, C427S214000

Reexamination Certificate

active

07976744

ABSTRACT:
The present invention is directed to a process for the preparation of a plane-parallel structure (a platelet-shaped body, or flake), comprising at least one dielectric layer consisting of one or more oxides of a metal selected from groups 3 to 15 of the periodic table, which comprises the steps of: (a) applying a thin film of the dielectric material on a flexible belt, by passing the belt through an aqueous solution of a fluorine scavenger and one or more fluorine containing metal complexes which are the precursors of the desired metal oxide coating; and subjecting said solution to microwave radiation to deposit the metal oxide onto said flexible belt, wherein step (a) can optionally be repeated using different fluorine containing metal complexes to produce one or more metal oxide layers or a gradient of concentration of 2 different metal oxides across the thickness; (b) separating the resulting layer from the flexible belt as plane-parallel structures.

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Peiro et al., Thin solid Films vol. 411 No. 2(May 2002) pp. 185-191.

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