Process of surface modification of magnetic heads by a reactive

Details Process of surface modification of magnetic heads by a reactive Process of surface modification of magnetic heads by a reactive

1997-06-04

1999-11-23

Resan, Stevan A.

Coating processes

Magnetic base or coating

Magnetic coating

427132, 427536, 427577, G11B 572

Patent

active

059896256

ABSTRACT:
A process is described for the modification of the outermost atomic layer of a substrate, such as a carbon layer having hydrogen atoms bonded at the surface, in a plasma chamber to covalently bond carbon-flourine groups such as CF.sub.3 groups to carbon atoms in the surface. After establishing a plasma process in which both etching and deposition are ocurring, a fluorinated gas is injected into the chamber to allow CF.sub.3 groups to bond to the surface. The process does not apply of a layer with a defined thickness, but rather conditions the surface for desired properties of high affinity for lubricants and low affinity for contaminants. The invention is particularly useful for heads and disks for use in magnetic recording.

REFERENCES:
patent: 5266409 (1993-11-01), Schmidt et al.
patent: 5409738 (1995-04-01), Matsunuma et al.
patent: 5661618 (1997-08-01), Brown et al.

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