Process of producing devices with photoelectrochemically produce

Details Process of producing devices with photoelectrochemically produce Process of producing devices with photoelectrochemically produce

1984-12-20

1986-11-11

Niebling, John F.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

20412975, C25F 312

Patent

active

046221140

ABSTRACT:
A photoelectrochemical etching process is described for producing gratings in various semiconductors. Because this is a direct, single step process, extreme uniformity is obtained over a wide area. The procedure is particularly useful for mode reflection in distributed feedback lasers.

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