Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1981-10-30
1985-03-26
Kaplan, G. L.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192C, 204192E, 427 39, 4272552, 427309, C23C 1500
Patent
active
045071896
ABSTRACT:
The present invention relates to a process of physical vapor deposition which homogeneously and tightly coats hard compounds on the surface of cutting tools, parts requiring wear resistance or ornaments such as a watch case and the like in order to improve wear resistance, heat resistance, corrosion resistance, appearance and the like of said tools, parts or ornaments.
The present invention can provide a method of physically coating a solid solution consisting of at least one compound selected from the group consisting of carbides, nitrides or oxides of metals belonging to IVb, Vb and VIb groups of the Periodic Table and/or aluminum oxide and zirconium oxide on the surface of said tools, parts or ornaments in the form of a single layer or multiple-layers, wherein the surface of said tools and the like is subjected to sputter cleaning in the atmosphere of hydrogen or the gaseous mixture of hydrogen and inert gas wherein hydrogen is present at 20% by volume or more, to homogeneously clean said surface of said tools and the like and as a result, the adhesion of the coating consisting of said compounds on said tools and the like is improved and equalized. Thus the above-mentioned properties of said tools and the like is further improved.
REFERENCES:
patent: 3411938 (1968-11-01), Storck et al.
patent: 3915757 (1975-10-01), Engel
patent: 4054426 (1977-10-01), White
patent: 4082637 (1978-04-01), Misiano et al.
patent: 4346123 (1982-08-01), Kaufmann
M. Kobayashi et al., "TiN and TiC Coating on Cemented Carbides by Ion Plating", Thin Solid Films, 54(1978), pp. 67-74.
J. L. Vossen, Thin Film Processes, Academic Press, New York, 1978, pp. 497-498, 516-521.
Doi Yoshihiko
Kobayashi Mitsunori
Maeda Yoshiki
Kaplan G. L.
Leader W. T.
Sumitomo Electric Industries Ltd.
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