Process of manufacturing a semiconductor device

Details Process of manufacturing a semiconductor device Process of manufacturing a semiconductor device

2011-04-05

2011-04-05

Olsen, Allan (Department: 1716)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C257SE21214, C257SE21221

Reexamination Certificate

active

07919415

ABSTRACT:
A process of manufacturing a semiconductor device includes the steps of forming a stacked structure of a first III-V compound semiconductor layer containing In and having a composition different from InP and a second III-V compound semiconductor layer containing In. The second III-V compound semiconductor layer is formed over the first III-V compound semiconductor layer and growing an InP layer at regions adjacent the stacked structure to form a stepped structure of InP. The process further includes the step of wet-etching the stepped structure and the second III-V compound semiconductor layer using an etchant containing hydrochloric acid and acetic acid to remove at least the second III-V compound semiconductor layer.

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