Process of manufacturing a piezoelectric element

Details Process of manufacturing a piezoelectric element Process of manufacturing a piezoelectric element

2006-10-17

2006-10-17

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S846000, C252S06290R, C310S340000, C310S341000, C310S358000, C427S100000

Reexamination Certificate

active

07120978

ABSTRACT:
A method of manufacturing a piezoelectric element structure having a supporting substrate and a piezoelectric film supported on the supporting substrate. A first layer, and a second layer having zirconium, each provided with a perovskite structure, are formed in that order on the supporting substrate. The two layers are formed to be in contact with each other or laminated through an intermediate layer. The temperature is set to 500° C. or more at the time of formation of the layers, and cooling is subsequently provided from the formation temperature at least to 450° C. with a cooling speed of 30° C./min or more.

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