Process of manufacturing a photosensitive device having a plural

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 29580, 357 30, 148 15, 148DIG118, H01L 2714

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active

046656090

ABSTRACT:
The surface of a substrate which includes a plurality of photovoltaic junctions spaced along it is prepared as follows: a first anodic oxide layer is formed to cover the whole surface of the substrate and ensures perfect control of the photovoltaic junctions, a second layer is deposited of metal which is impervious to the radiation to be detected, then through photolithography, only the zones of the second layer that it is desired to render impervious to the radiation to be detected are maintained and the remainder removed; and finally, a layer of dielectric material is deposited to cover the whole surface.

REFERENCES:
patent: 3577175 (1971-05-01), Gri et al.
patent: 4355456 (1982-10-01), Harnagel et al.
Ghandi, VLSI Fabrication Principles, Silicon and Gallium Arsenide, John Wiley & Sons, New York, 1983, pp. 421, 476 and 498.
Patents Abstracts of Japan, vol. 6, No. 151, (E-124)(1029), 11 aout 1982; and JP-A-57 73 970 (Suwa Seikosha K.K.) (08.05.1982) * en entier *.
IBM Technical Disclosure Bulletin, vol. 19, No. 11, Avril 1977, New York (US) J.D. Tompkins: "Solid-State Optical . . . ".

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