Fishing – trapping – and vermin destroying
Patent
1995-06-07
1997-01-07
Niebling, John
Fishing, trapping, and vermin destroying
437974, 437915, 148DIG135, 148DIG150, 1566621, 1566301, H01L 21283, H01L 2156, H01L 2158, H01L 2160
Patent
active
055916783
ABSTRACT:
A microelectronic device is fabricated by furnishing a first substrate (40) having a silicon etchable layer (42), a silicon dioxide etch-stop layer (44) overlying the silicon layer (42), and a single-crystal silicon wafer (46) overlying the etch-stop layer (44), the wafer (46) having a front surface (52) not contacting the etch stop layer (44). A microelectronic circuit element (50) is formed in the single-crystal silicon wafer (46). The method further includes attaching the front surface (52) of the single-crystal silicon wafer (46) to a second substrate (58), and etching away the silicon layer (42) of the first substrate (40) down to the etch-stop layer (44). The second substrate (58) may also have a microelectronic circuit element (58') therein that can be electrically interconnected to the microelectronic circuit element (50).
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Bendik Joseph J.
Finnila Ronald M.
Malloy Gerard T.
Denson-Low W. K.
Graybill David E.
HE Holdings Inc.
Niebling John
Schubert W. C.
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