Process of making diazoquinone sensitized polyamic acid based ph

Details Process of making diazoquinone sensitized polyamic acid based ph Process of making diazoquinone sensitized polyamic acid based ph

1989-09-08

1990-07-17

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430192, 430193, 430325, 430326, 430330, 430270, G03F 7023, G03C 160

Patent

active

049421085

ABSTRACT:
The dissolution rate in alkaline developer solutions of image-wise exposed photoresist systems based on diazoquinone sensitized polyamic acid is reduced to prepare relief images of fine line resolution by reducing the acidity of the polyamic acid prior to exposure.

REFERENCES:
patent: 3533796 (1970-10-01), Lassig et al.
patent: 3551154 (1970-12-01), Di Blas et al.
patent: 3869292 (1975-03-01), Peters
patent: 3944421 (1976-03-01), Lewis et al.
patent: 4080246 (1978-03-01), Battisti et al.
patent: 4093461 (1978-06-01), Loprest et al.
patent: 4196003 (1980-04-01), Watanabe
patent: 4242437 (1980-12-01), Rohloff
patent: 4331705 (1982-05-01), Samudrala
patent: 4339521 (1982-07-01), Ahne et al.
patent: 4369090 (1983-01-01), Wilson et al.
patent: 4397937 (1983-08-01), Clecak et al.
patent: 4411981 (1983-10-01), Minazaki
patent: 4439516 (1984-03-01), Cernigliaro et al.
patent: 4451551 (1984-05-01), Kataoka et al.
patent: 4454220 (1984-06-01), Goff
patent: 4524121 (1985-06-01), Gleim et al.
patent: 4576901 (1980-03-01), Stahlhofen et al.
patent: 4581321 (1986-04-01), Stahlhofen
patent: 4745045 (1988-05-01), Fredericks et al.
patent: 4885232 (1989-12-01), Spak
De Forest, W. S., "Photoresist Materials and Processes", McGraw-Hill Book Co., 1975, pp. 147-149.

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