Process of making CD uniformity in high track density...

Details Process of making CD uniformity in high track density... Process of making CD uniformity in high track density...

2007-11-13

2007-11-13

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603140, C029S603120, C360S119050, C360S122000, C360S125020, C427S130000, C204S192100, C204S192340

Reexamination Certificate

active

10886888

ABSTRACT:
A process for achieving tighter reader and writer track width control is disclosed. The write gap layer is used as the plating seed on which the upper pole is electro-formed. This allows the write gap layer to then be deposited through a precisely controllable process such as sputtering. Since less material needs to be removed during pole trimming, a thinner layer of photoresist may be used, resulting in improved dimensional control.

REFERENCES:
patent: 5559654 (1996-09-01), Das
patent: 5688380 (1997-11-01), Koike et al.
patent: 5875542 (1999-03-01), Tran et al.
patent: 6469868 (2002-10-01), Yamamoto et al.
patent: 6636460 (2003-10-01), Akiyama et al.
patent: 62-149024 (1987-07-01), None

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