Process of forming mask images

Details Process of forming mask images Process of forming mask images

1979-11-05

1981-01-20

Kimlin, Edward C.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430 17, 430321, 430323, 430328, 430329, 430330, 430421, 430430, 430432, G03C 500

Patent

active

042463289

ABSTRACT:
A process of forming mask images having high contrast at the edges thereof and possessing high heat resistance and high durability comprising imagewise exposing a photographic light-sensitive material comprising a transparent support having thereon, in succession, a mask layer and a layer of an emulsion of a silver halide in a binder followed by development without employing fixing processing to form silver images at the image areas, removing the silver forming the silver images at the image areas with an aqueous solution containing ceric sulfate and sulfuric acid; then reducing the silver halide remaining at the non-image areas to silver; halogenating the silver formed in the non-image areas with an aqueous solution containing dichromate ions and halogen ions; heating the photographic material above about 200.degree. C. to thermally decompose the binder in the silver halide emulsion layer; removing selectively the thermally decomposed binder at the image areas with a solution capable of removing the thermally decomposed binder to uncover areas of the mask layer thereunder, and thereafter removing by etching the uncovered areas of the mask layer. The mask images formed can be used for making photo masks having high resolving power and high edge contrast as well as excellent durability.

REFERENCES:
patent: 3567447 (1971-03-01), Chand
patent: 3748136 (1973-07-01), Willems
patent: 3960560 (1976-06-01), Sato
patent: 3966473 (1976-06-01), Sato
patent: 4056395 (1977-11-01), Sato et al.

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