Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1992-04-30
1993-05-04
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
4274071, 427131, 427282, 427340, 437 52, 437195, 437211, C23C 2600
Patent
active
052080668
ABSTRACT:
A process of forming a patterned polyimide film includes the step of conversion of a polyimide precursor into polyimide. The improvement is imidizing the precursor by means of a chemical imidizing reagent. Typically a film of polyimide precursor is formed on a substrate, and mask which is negative with respect to the desired pattern is formed on the film. The film is contacted through the mask with a chemical imidizing reagent to effect imidization of unmasked portions, thereby forming polyimide. The mask and masked portions of the film are removed, leaving the desired polyimide pattern. High temperatures and harmful etchants can be avoided.
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Fujisaki Koji
Ikeda Takayoshi
Miwa Takao
Numata Shun-ichi
Shimanoki Hisae
Beck Shrive
Dang Vi Duong
Hitachi , Ltd.
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