Process of fabricating semiconductor device

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Complementary bipolar transistors

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438365, 438371, H01L 218228

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active

058937439

ABSTRACT:
A process for forming a first bipolar transistor having a single polysilicon structure and a second bipolar transistor having a single polysilicon structure and being of a conducting type opposite to that of the first bipolar transistor on the same substrate. In the process of fabricating a semiconductor device in which a first bipolar transistor having a single polysilicon structure, a second bipolar transistor having a single polysilicon structure and being of a conducting type opposite to that of the first bipolar transistor, and a third bipolar transistor having a double polysilicon structure are provided on the same semiconductor substrate, a base contact portion of the first bipolar transistor and an emitter of the second bipolar transistor are formed in the same step, and an emitter of the first bipolar transistor and base contact portions of the second and third bipolar transistors are formed in the same step.

REFERENCES:
patent: 4898836 (1990-02-01), Zambrano et al.
patent: 5001073 (1991-03-01), Huie
patent: 5011784 (1991-04-01), Ratnahumar
patent: 5151378 (1992-09-01), Ramde

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