Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Complementary bipolar transistors
Patent
1997-06-17
1999-04-13
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Forming bipolar transistor by formation or alteration of...
Complementary bipolar transistors
438365, 438371, H01L 218228
Patent
active
058937439
ABSTRACT:
A process for forming a first bipolar transistor having a single polysilicon structure and a second bipolar transistor having a single polysilicon structure and being of a conducting type opposite to that of the first bipolar transistor on the same substrate. In the process of fabricating a semiconductor device in which a first bipolar transistor having a single polysilicon structure, a second bipolar transistor having a single polysilicon structure and being of a conducting type opposite to that of the first bipolar transistor, and a third bipolar transistor having a double polysilicon structure are provided on the same semiconductor substrate, a base contact portion of the first bipolar transistor and an emitter of the second bipolar transistor are formed in the same step, and an emitter of the first bipolar transistor and base contact portions of the second and third bipolar transistors are formed in the same step.
REFERENCES:
patent: 4898836 (1990-02-01), Zambrano et al.
patent: 5001073 (1991-03-01), Huie
patent: 5011784 (1991-04-01), Ratnahumar
patent: 5151378 (1992-09-01), Ramde
Ammo Hiroaki
Gomi Takayuki
Nguyen Tuan H.
Sony Corporation
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