Process of fabricating polymer sustained microelectrodes

Details Process of fabricating polymer sustained microelectrodes Process of fabricating polymer sustained microelectrodes

2007-07-10

2007-07-10

Ahmed, Shamim (Department: 1765)

Etching a substrate: processes

Forming or treating electrical conductor article

C216S002000, C216S041000, C216S083000, C216S100000, C438S689000, C438S706000, C438S745000

Reexamination Certificate

active

10761902

ABSTRACT:
A process for fabricating a microelectrode is described that includes: a) providing a substrate comprising at least one polymer micro-ridge, where the polymer micro-ridge comprises an upper surface and two walls, and the two walls form an angle with a lower surface; b) depositing a metal thin film on the upper surface, the two walls, and the lower surface; and c) etching a predetermined amount of the deposited metal thin film on the lower surface to form the microelectrode.

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