Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-10-03
2010-10-19
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S846000, C029S874000, C029S884000, C029S842000, C438S622000, C438S637000, C438S700000
Reexamination Certificate
active
07814650
ABSTRACT:
The present invention is directed toward methods of fabricating components for microelectronic devices, microelectronic devices including memory cells or other components, and computers including memory devices. One embodiment is directed toward a method of fabricating a memory cell on a workpiece having a substrate, a plurality of active areas in the substrate, and a dielectric layer over the active areas. The method includes constructing bit line contact openings in the dielectric layer over first portions of the active areas and cell plug openings over second portions of the active areas. The method also includes depositing a first conductive material into the bit line contact openings to form bit line contacts and, into the cell plug openings to form cell plugs. Then, a trench is formed through an upper portion of a plurality of the bit line contacts and portions of the dielectric layer between bit line contacts.
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Micro)n Technology, Inc.
Perkins Coie LLP
Tugbang A. Dexter
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