Process of fabricating electro-optic polymer devices with...

Details Process of fabricating electro-optic polymer devices with... Process of fabricating electro-optic polymer devices with...

2005-02-08

2005-02-08

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S031000, C438S692000, C438S221000, C438S689000, C438S548000, C430S321000, C430S322000, C430S323000, C385S002000, C385S122000, C385S129000, C385S008000, C385S014000

Reexamination Certificate

active

06852563

ABSTRACT:
A process for fabricating an electro-optic device is decribed that includes: a) providing a substrate comprising at least two polymer micro-ridges, where each polymer micro-ridge comprises an upper surface and two walls, and the two walls form an angle with a lower surface; b) depositing a metal thin film on the upper surface, the two walls, and the lower surface; c) etching a predetermined amount of the deposited metal thin film on the lower surface, thereby forming two electrodes separated by a gap; d) depositing a nonlinear optical polymer in the gap between the two electrodes; and e) poling the nonlinear optical polymer to induce electro-optic activity.

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