Process of fabricating a precision microcontact printing stamp

Details Process of fabricating a precision microcontact printing stamp Process of fabricating a precision microcontact printing stamp

2005-04-19

2005-04-19

Vargot, Mathieu D. (Department: 1732)

Plastic and nonmetallic article shaping or treating: processes

Utilizing special inert gaseous atmosphere or flushing mold...

C264S102000, C264S319000

Reexamination Certificate

active

06881366

ABSTRACT:
A process of making a microcontact printing stamp useful in the microcontact printing of a microcircuit. In this process an elastomeric microcontact printing stamp is formed by curing a degassed liquid elastomeric monomer or oligomer, optionally saturated with helium, a mixture of helium and an inert gas or a mixture of hydrogen and an inert gas, in a mold in which a photoresist master, defining a microcircuit in negative relief, is predisposed above a backplane.

REFERENCES:
patent: 5435943 (1995-07-01), Adams et al.
Kumar et al., Appl. Phys. Lett., 63, (14), 2002-2004 (Oct. 1993).
Hidber et al., Langmuir, 12, 1375-1380 (1996).

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