Process of evaporating a liquid in a cyclone evaporator

Details Process of evaporating a liquid in a cyclone evaporator Process of evaporating a liquid in a cyclone evaporator

1997-02-26

1999-05-04

Beck, Shrive

Electric resistance heating devices

Heating devices

Vaporizer

392396, 4272481, A01G 1306

Patent

active

059012714

ABSTRACT:
A cyclone evaporator includes an evaporator body with an evaporation chamber therein. The evaporation chamber preferably includes a thermally conductive sidewall having a generally cylindrical upper portion and a downwardly tapered lower portion. The evaporator body further includes a cover having a vapor outlet opening into the evaporation chamber and an outlet tube. The outlet tube circumscribes the vapor outlet and extends into a lower portion of the evaporation chamber. A liquid precursor passage and a carrier gas passage extend through the evaporator body and open into the evaporation chamber. In one embodiment, the carrier gas passage is positioned to direct carrier gas parallel to liquid precursor flow and intersect the liquid precursor at a liquid precursor passage outlet within the evaporation chamber. In another embodiment, the carrier gas passage is positioned to direct carrier gas across an outlet of liquid precursor passage. In both embodiments, the carrier gas facilitates atomization of the liquid precursor and flows cyclonically to distribute the atomized liquid precursor within the evaporation chamber. The liquid precursor deposits on the thermally conductive evaporation chamber wall and evaporates to form a gas precursor. The gas precursor flows with the carrier gas and exits the cyclone evaporator through the outlet tube and the vapor outlet. The cyclone evaporator is particularly advantageous for evaporating low vapor pressure liquids useful in semiconductor fabrication processes such as chemical vapor deposition.

REFERENCES:
patent: 1183098 (1916-05-01), Merrell et al.
patent: 3969499 (1976-07-01), Shires et al.
patent: 4726686 (1988-02-01), Wolf et al.
patent: 4734109 (1988-03-01), Cox
patent: 5059357 (1991-10-01), Wolf et al.
patent: 5203925 (1993-04-01), Shibuya et al.
patent: 5204314 (1993-04-01), Kirlin et al.
patent: 5246881 (1993-09-01), Sandhu et al.
patent: 5252134 (1993-10-01), Stauffer
patent: 5372754 (1994-12-01), Ono
patent: 5383970 (1995-01-01), Asaba et al.
S.D. Hersee et al., "The Operation of Metalorganic Bubblers at Reduced Pressure", 1990 American Vacuum Society, J. Vac. Sci. Technolo. A, vol. 8, No. 2, Mar./Apr. 1990, pp. 800-804.
J.J. Sullivan et al., "Mass Flow Measurement and Control of Low Vapro Pressure Sources", J. Vac. Sci.Technol. A, vol. 7, No. 3, May/Jun. 1989, pp. 2387-2392.
Ulrich et al., "MOCVD of Superconducting YBCO Films Using an Aerosol Feed System", Extended Abstracts, American Institute of Chemical Engineers 1994 Annual Meeting, Nov. 13-18, 1994, p. 16.

Affiliated with

Also associated with

Rating

Process of evaporating a liquid in a cyclone evaporator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process of evaporating a liquid in a cyclone evaporator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process of evaporating a liquid in a cyclone evaporator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1876226