Process of direct growth of carbon nanotubes on a substrate...

Details Process of direct growth of carbon nanotubes on a substrate... Process of direct growth of carbon nanotubes on a substrate...

2005-02-15

2005-02-15

Wong, Edna (Department: 1753)

Coating processes

Applying superposed diverse coating or coating a coated base

Metal coating

C427S406000, C427S585000, C427S250000, C427S255280, C204S192100, C205S170000, C205S181000, C205S183000, C205S186000, C205S191000, C205S192000

Reexamination Certificate

active

06855376

ABSTRACT:
Carbon nanotubes are directly grown on a substrate surface having three metal layers thereon by a thermal chemical vapor deposition at low-temperature, which can be used as an electron emission source for field emission displays. The three layers include a layer of an active metal catalyst sandwiched between a thick metal support layer formed on the substrate and a bonding metal layer. The active metal catalyst is iron, cobalt, nickel or an alloy thereof; the metal support and the bonding metal independently are Au, Ag, Cu, Pd, Pt or an alloy thereof; and they can be formed by sputtering, chemical vapor deposition, physical vapor deposition, screen printing or electroplating.

REFERENCES:
patent: 6672926 (2004-01-01), Liu et al.
patent: 20020160111 (2002-10-01), Sun et al.
patent: 1 061 041 (2000-12-01), None
patent: 1 061 043 (2000-12-01), None

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