Process monitoring system for lithography lasers

Details Process monitoring system for lithography lasers Process monitoring system for lithography lasers

2007-04-10

2007-04-10

Vo, Tuyet (Department: 2821)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S009000, C372S038060, C702S188000

Reexamination Certificate

active

10767316

ABSTRACT:
A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.

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