Process monitor usig impedance controlled I/O controller

Details Process monitor usig impedance controlled I/O controller Process monitor usig impedance controlled I/O controller

1996-04-04

1997-08-05

Voeltz, Emanuel T.

Boots, shoes, and leggings

36446828, 438 18, G01R 2700, G01R 3126, H01L 2100, H01L 2166

Patent

active

056548958

ABSTRACT:
A process monitor and a method of using the same to determine the relative strength of a semiconductor fabrication process are disclosed. An impedance control output from an impedance controller circuit located on a semiconductor device is retrieved. Based upon a value of the retrieved impedance control output, the relative strength of the semiconductor fabrication process used to fabricate the semiconductor device is determined.

REFERENCES:
patent: 4743841 (1988-05-01), Takeuchi
patent: 4970454 (1990-11-01), Stambaugh et al.
patent: 5055715 (1991-10-01), Inaba
patent: 5068547 (1991-11-01), Gascoyne
patent: 5095267 (1992-03-01), Merrill et al.
patent: 5444637 (1995-08-01), Smesny et al.
patent: 5486786 (1996-01-01), Lee

Affiliated with

Also associated with

Rating

Process monitor usig impedance controlled I/O controller does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process monitor usig impedance controlled I/O controller, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process monitor usig impedance controlled I/O controller will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1079438