Process module tuning

Details Process module tuning Process module tuning

2004-05-26

2008-08-19

DeCady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Optimization or adaptive control

C700S028000, C700S121000, C700S207000, C219S390000, C219S444100, C219S443100, C219S402000, C219S405000, C324S754090, C324S713000, C324S465000, C324S511000

Reexamination Certificate

active

07415312

ABSTRACT:
A process module tuning method characterizes a process module by gathering data using a process condition measuring device to measure process outputs while inputs are excited. The data is used to identify a dynamic process model. The dynamic process model is then be used to determine process input settings that will produce desired outputs. For multi-zone process modules, the interactions between zones may be modeled.

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