Process module dispense arm

Details Process module dispense arm Process module dispense arm

1991-05-28

1992-10-20

Jones, W. Gary

Coating apparatus

Projection or spray type

Rotating work

118323, 192 12R, B05B 1700

Patent

active

051566818

ABSTRACT:
A drive mechanism which permits both rotational and vertical translation of a fluid dispense arm within a wafer processing system. A motor drives a brake/clutch coupling which, through selective actuation and the utilization of two drive gears, causes selective rotation and/or translation of an output shaft attached to the fluid dispense arm. Selective rotation and/or translation of the output shaft and the fluid dispense arm permits the use of the apparatus without modification of the spin deflector and associated baffling in the wafer processing area.

REFERENCES:
patent: 4515256 (1985-05-01), Kitano et al.
patent: 5085374 (1992-02-01), Okuda et al.

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