Process liquid supply mechanism and process liquid supply...

Details Process liquid supply mechanism and process liquid supply... Process liquid supply mechanism and process liquid supply...

2005-02-01

2005-02-01

Nguyen, Hoang (Department: 3748)

Fluid sprinkling, spraying, and diffusing

Processes

C239S069000, C239S071000

Reexamination Certificate

active

06848625

ABSTRACT:
A process liquid supply mechanism for supplying a process liquid comprises a process liquid supply source for supplying a process liquid, a process liquid discharging nozzle for discharging the process liquid, a pipe connecting the process liquid supply source to the process liquid discharging nozzle, a pump mounted to the pipe for allowing the process liquid to be discharged from the process liquid discharging nozzle, a pressure sensor for detecting the pressure of the process liquid at a prescribed position intermediate between the pump and the process liquid discharging nozzle, and a controller for controlling the inner pressure of the pump based on the pressure value detected by the pressure sensor and the relationship obtained in advance between the pressure and the discharging rate of the process liquid such that the process liquid is discharged at a prescribed discharging rate.

REFERENCES:
patent: 5035200 (1991-07-01), Moriyama et al.
patent: 5680329 (1997-10-01), Lloyd et al.
patent: 5938847 (1999-08-01), Akimoto et al.
patent: 6056998 (2000-05-01), Fujimoto
patent: 6089469 (2000-07-01), Fusama et al.
patent: 6238109 (2001-05-01), Minami
patent: 6391111 (2002-05-01), Fujimoto et al.
patent: 6725940 (2004-04-01), Klein et al.

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