Process improvements for titanium-tungsten etching in the presen

Details Process improvements for titanium-tungsten etching in the presen Process improvements for titanium-tungsten etching in the presen

1997-10-30

2000-01-18

Kunemund, Robert

Compositions

Etching or brightening compositions

Inorganic acid containing

438614, 438654, 438695, 438756, 216 13, 216 72, 216108, H01L 2100

Patent

active

060155051

ABSTRACT:
A process and etchant solution for chemical wet etching of thin film metals in the presence of a protected metal. The etching solution has a pH range of about 2.7 to 4.0. The etching solution may include hydrogen peroxide, potassium sulfate, and potassium EDTA, and it reduces or eliminates the incidence of etch-resistant metal without damaging the protected metal.

REFERENCES:
patent: 5462638 (1995-10-01), Datta et al.
patent: 5486282 (1996-01-01), Datta et al.
patent: 5503286 (1996-04-01), Nye, III et al.
patent: 5543032 (1996-08-01), Datta et al.
patent: 5629564 (1997-05-01), Nye, III et al.
patent: 5800726 (1998-09-01), Cotte et al.

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