Process gas supply unit

Details Process gas supply unit Process gas supply unit

1998-06-03

2000-11-28

Shaver, Kevin

Fluid handling

Systems

Multiple inlet with single outlet

137606, 137884, F16K 5100

Patent

active

061521752

ABSTRACT:
A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

REFERENCES:
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patent: 3654960 (1972-04-01), Kiernan
patent: 3915194 (1975-10-01), Friedrich
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patent: 4703913 (1987-11-01), Hunkapiller
patent: 4823834 (1989-04-01), Ariizumi et al.
patent: 4848405 (1989-07-01), Albrecht
patent: 4911195 (1990-03-01), Farnsworth et al.
patent: 5640995 (1997-06-01), Packard et al.
patent: 5720317 (1998-02-01), Nimberger
patent: 5810115 (1998-09-01), Mismas
patent: 5836355 (1998-11-01), Markulec et al.

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