Process gas supply unit

Details Process gas supply unit Process gas supply unit

1999-04-22

2000-08-29

Fox, John

Fluid handling

Systems

With flow control means for branched passages

137269, F16K 1120

Patent

active

061093033

ABSTRACT:
A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.

REFERENCES:
patent: 5769110 (1998-06-01), Ohmi et al.
patent: 5819782 (1998-10-01), Itafuji
patent: 5836355 (1998-11-01), Markulec et al.
patent: 5924447 (1999-07-01), Evans et al.
patent: 5992463 (1999-11-01), Redemann et al.

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