Process gas supply piping system

Details Process gas supply piping system Process gas supply piping system

1988-05-24

1990-04-17

Walton, George L.

Fluid handling

Processes

Cleaning, repairing, or assembling

134166C, 137240, 222148, B08B 902

Patent

active

049171364

ABSTRACT:
This invention relates to the supply piping system of the process gas for various types of thin-film making and fine pattern dry etching process, and more particularly to the process gas supply system, which makes it possible to form high quality thin films and to perform high quality etching.
Specifically, when there are a unit in operation with process gas supplied and a unit not in operation with no process gas supplied in a process gas supply piping system, supplying the process gas to two or more process units from a cylinder cabinet piping system, this invention provides a gas supply piping system, where the process gas supply piping line to the process unit not in operation can be purged with purge gas all the time and where gas flows all the time through all of gas supply piping lines to eliminate the stagnation of gas.

REFERENCES:
patent: 4063588 (1977-12-01), Thorogood
patent: 4169486 (1979-10-01), Otteman
patent: 4216185 (1980-08-01), Hopkins
patent: 4270564 (1981-06-01), Blackburn et al.
patent: 4281683 (1981-08-01), Hetherington
patent: 4383547 (1983-05-01), Lorenz et al.
patent: 4485840 (1984-12-01), Erwin
patent: 4741354 (1988-05-01), DeMild, Jr.

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