Process gas flow control module

Details Process gas flow control module Process gas flow control module

1977-09-19

1979-11-20

Cline, William R.

Fluid handling

With indicator, register, recorder, alarm or inspection means

Plural

73209, 73199, 137557, 137561A, 137883, 137884, 137269, F16K 3700

Patent

active

041747330

ABSTRACT:
A module which integrates into a single block a process gas flow control system for precisely metering the flow of gas fed into a furnace diffusion tube or other utilization device. The block is formed of a chemically-inert body having cavities therein for nesting a gas filter, a pressure-regulator, a flowmeter, a pressure indicator and the other components of the system necessary to set the flow rate and pressure of the gas. These components are intercoupled by internal bores in the block which define flow passages that communicate with the cavities.

REFERENCES:
patent: 2655041 (1953-10-01), Jacobsson
patent: 2970472 (1961-02-01), Jones et al.
patent: 2970473 (1961-02-01), Kendig
patent: 2982135 (1961-05-01), Rogers
patent: 3117587 (1964-01-01), Willinger
patent: 3259054 (1966-07-01), Vanzo, Jr. et al.
patent: 3260278 (1966-07-01), Lund et al.
patent: 3848626 (1974-11-01), Smith et al.
patent: 3857407 (1974-12-01), Olson
patent: 3956933 (1976-05-01), Metzger
patent: 3971542 (1976-07-01), Lee

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