Process gas distribution system and method with automatic transd

Details Process gas distribution system and method with automatic transd Process gas distribution system and method with automatic transd

1996-04-15

1997-08-12

Trammell, James P.

Boots, shoes, and leggings

73708, G01F 2500, G01G 2301

Patent

active

056572549

ABSTRACT:
A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an "offset" to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.

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patent: 4866594 (1989-09-01), David et al.
patent: 4989160 (1991-01-01), Garrett et al.
patent: 5014211 (1991-05-01), Turner et al.

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