Boots – shoes – and leggings
Patent
1995-04-04
1996-03-05
Gordon, Paul P.
Boots, shoes, and leggings
364141, 364143, 364138, 364510, G05B 1101, G06F 1500
Patent
active
054973163
ABSTRACT:
Gas flow control units in cabinet are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. The flow control units are adapted to deliver process gas selectively from one of two supply tanks to any one or all of four different tool locations. Simple, fast, low-cost purging of the gas delivery conduits is provided to facilitate maintenance, gas cylinder changes, etc. Means are provided to enable pulse purging of the long gas delivery conduit from the cabinet to the tool when flow-through or other purging is not possible.
REFERENCES:
patent: 4120331 (1978-10-01), Krivanek, III
patent: 4169486 (1979-10-01), Otteman et al.
patent: 4383547 (1983-05-01), Lorenz et al.
patent: 4554942 (1985-11-01), Williams et al.
patent: 4573114 (1986-02-01), Ferguson et al.
patent: 4741354 (1988-05-01), DeMild, Jr.
patent: 4850703 (1989-07-01), Hanaoka et al.
patent: 4869301 (1989-09-01), Ohmi et al.
patent: 4917136 (1990-04-01), Ohmi et al.
patent: 4989160 (1991-01-01), Garrett et al.
patent: 5080146 (1992-01-01), Arasteh
patent: 5137047 (1992-08-01), George
patent: 5137063 (1992-08-01), Foster et al.
patent: 5140516 (1992-08-01), Rainville
DuRoss Ronald R.
Geist Stephen G.
Hayes Gregory L.
Sierk Dennis A.
Gordon Paul P.
Neff Gregor N.
SCI Systems Inc.
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