Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
Patent
1979-04-25
1981-02-24
Vertiz, O. R.
Chemistry of inorganic compounds
Silicon or compound thereof
Oxygen containing
423336, 423659, 261DIG54, 261DIG75, C01B 3312
Patent
active
042527805
ABSTRACT:
A process for working up hydrolyzable and/or water-soluble compounds by ping them in water is provided wherein the compounds are fed into the funnel of a rotating cone of water running down into the tip of the cone, with the water being constantly renewed by a supply at the base of the cone. The process is particularly useful for working up mixtures containing silanes and/or chlorosilanes in silicon deposition plants.
REFERENCES:
patent: 2684231 (1954-07-01), Pomykala
patent: 3202281 (1965-08-01), Weston
patent: 3400818 (1968-09-01), Tarjan
patent: 3567194 (1971-03-01), Shah et al.
patent: 3775314 (1973-11-01), Beitzel et al.
patent: 3833719 (1974-09-01), Kuerten et al.
patent: 3841061 (1974-10-01), Pike
Koppl Franz
Zainer Thorgard
Collard Allison C.
Galgano Thomas M.
Straub Gary P.
Vertiz O. R.
Wacker-Chemitronic Gesellschaft fur Elektronik Grundstoffe mbH
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