Process for treating exhaust gas

Details Process for treating exhaust gas Process for treating exhaust gas

2005-03-22

2005-03-22

Bos, Steven (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

C423S24000R

Reexamination Certificate

active

06869579

ABSTRACT:
A process for treating and recovering CVD exhaust gas is provided, which can reduce periodical maintenance by converting the raw gas employed and the intermediate products contained in the CVD system into highly volatile halides, separating and recovering them as materials with good reusability. An unreacted raw gas and intermediate products contained in CVD exhaust gas are partially decomposed by being subject to decomposition treatment or conversion reaction treatment, and then halogenosilane gas and hydrogen chloride are separated and recovered. Alternatively, a raw gas and intermediate products are decomposed into hydrogen chloride and recovered.

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patent: WO 9930809 (1999-06-01), None

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