Process for treating disk-shaped workpieces with a liquid

Details Process for treating disk-shaped workpieces with a liquid Process for treating disk-shaped workpieces with a liquid

1996-04-17

1997-12-02

Warden, Robert J.

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

134 27, 134 36, B08B 308

Patent

active

056931492

ABSTRACT:
A process for treating disk-shaped workpieces with a liquid in a chamber which can be sealed in gas-tight manner, in which the workpieces stacked in a transport rack are brought into contact with the fed-in liquid in the closed chamber, the liquid is conducted away out of the chamber and noxious vapors or gases originating from the liquid are scrubbed out and are conducted away out of the chamber in the dissolved condition.

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