Process for treating development waste liquor

Details Process for treating development waste liquor Process for treating development waste liquor

1998-08-11

2000-11-28

Smith, Duane

Liquid purification or separation

Processes

Making an insoluble substance or accreting suspended...

210748, B01D 2100

Patent

active

061531073

ABSTRACT:
A process for treating a development waste liquor containing a photosensitive resin and a surface active agent, which includes subjecting the waste liquor to a treatment for diminishing the efficacy of the surface active agent, thereby separating the resin component from the development waste liquor, thereafter irradiating the development waste liquor with an ultraviolet ray having a wavelength of 300 to 400 nanometers to cure the resin component in the development waste liquor, and then removing the resulting solids.

REFERENCES:
patent: 5124736 (1992-06-01), Yamamoto et al.
patent: 5133932 (1992-07-01), Gunn et al.
patent: 5194583 (1993-03-01), Krulik
patent: 5540848 (1996-07-01), Engelhard
IBM Technical Disclosure Bulletin, vol. 22, No. 4, p. 1414, Sep. 1979 (XP-002084040).

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