Process for the thermo-migration of liquid phases

Details Process for the thermo-migration of liquid phases Process for the thermo-migration of liquid phases

1983-08-18

1985-05-28

Ozaki, G.

Metal treatment

Compositions

Heat treating

29574, 148171, 148172, 148188, H01L 21225

Patent

active

045198500

ABSTRACT:
In a process for the thermo-migration of liquid phases in a temperature gradient, which process starts from a metal coating (2) on a semiconducting substrate (1), the metal coating (2) is applied to a plane substrate surface (11), the temperature gradient is produced, in vacuo, by means of two flat faces (5, 6), which are parallel and can be heated uniformly, and is reversed by lowering the temperature of the warmer face and, at the same time, raising the temperature of the cooler face. The smooth temperature distribution leads to a reduction in the number of process steps, while at the same time yielding good results.

REFERENCES:
patent: 2813048 (1957-11-01), Pfann
patent: 3396059 (1968-08-01), Giammanco
patent: 3484302 (1969-12-01), Maeda et al.
patent: 3897277 (1975-07-01), Blumenfeld
patent: 3977910 (1976-08-01), Anthony et al.
patent: 3998662 (1976-12-01), Anthony et al.
patent: 4041278 (1977-08-01), Boah
patent: 4199379 (1980-04-01), Mizrah
patent: 4371421 (1983-02-01), Fan et al.

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