Process for the separation of a gaseous hydride or a mixture of

Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...

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95 52, 95 53, 95 54, 95 55, B01D 5322

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055036570

ABSTRACT:
The invention relates to a process for the separation of a gaseous hydride or a mixture of gaseous hydrides from a gaseous medium containing at least one gas from the group consisting of H.sub.2, Ar, He, according to which the gaseous medium is passed on to a membrane module so that the concentration of the hydride or of the mixture of hydrides obtained at the outlet of the module is higher than their initial concentration in the gaseous medium.

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Journal of Membrane Science, "Separation of Hydrogen from Silane via Membranes: A Step in the Production of Ultra-High-Purity Silicon", Hsieh et al. pp. 143-152, 1992.
WPI Database of JP-A-60 022 902, Feb. 2, 1985.

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