Process for the refurbishing of a sputtering target

Details Process for the refurbishing of a sputtering target Process for the refurbishing of a sputtering target

2011-01-18

2011-01-18

Le, Emily M (Department: 1734)

Powder metallurgy processes

Powder metallurgy processes with heating or sintering

Heat and pressure simultaneously to effect sintering

C419S008000, C425S078000

Reexamination Certificate

active

07871563

ABSTRACT:
Disclosed in this specification is a process for refurbishing a spent sputtering target. The process includes the step of applying sufficient heat and axial force to the filled sputtering target to hot press the filled sputtering target such that the powdered metal fuses with the un-sputtered metal, producing a refurbished target. The process may be used to refurbish precious metal targets, such as ruthenium targets.

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