Process for the protection of a diaphragm during the generation

Details Process for the protection of a diaphragm during the generation Process for the protection of a diaphragm during the generation

1990-10-25

1992-06-02

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250398, H01J 332

Patent

active

051189496

ABSTRACT:
The invention relates to a process for the protection of a diaphragm during the generation of electron-beam pulses by means of alternately deflecting the electron beam onto the diaphragm and onto a processing site.
In order to prevent damage to the diaphragm from the thermal effect of the electron beam, the electron beam is distributed with respect to space and/or time over an enlarged striking surface.

REFERENCES:
patent: 4439685 (1984-03-01), Plies
patent: 4445041 (1984-04-01), Kelly et al.
patent: 4467205 (1984-08-01), Beisswenger et al.
patent: 4721909 (1988-01-01), Richardson
patent: 4839520 (1989-06-01), Garth

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