Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1980-08-28
1982-07-20
Cooper, Jack
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
203 4, 203 71, 203DIG6, 423341, 423342, 423349, C01B 3304
Patent
active
043405746
ABSTRACT:
Tri- and dichlorosilanes formed by hydrogenation in the course of the reaction of metallurgical silicon, hydrogen and recycle silicon tetrachloride are employed as feed into a separation column arrangement of sequential separation columns and redistribution reactors which processes the feed into ultrahigh purity silane and recycle silicon tetrachloride. A slip stream is removed from the bottom of two sequential columns and added to the recycle silicon tetrachloride process stream causing impurities in the slip streams to be subjected to reactions in the hydrogenation step whereby waste materials can be formed and readily separated.
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Cooper Jack
McCarthy, Jr. Frederick J.
Union Carbide Corporation
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