Process for the production of transparent aluminum nitride films

Details Process for the production of transparent aluminum nitride films Process for the production of transparent aluminum nitride films

1988-09-02

1989-11-21

Doll, John

Chemistry of inorganic compounds

Nitrogen or compound thereof

Binary compound

156DIG61, 156DIG99, C01B 21072

Patent

active

048821365

ABSTRACT:
A process is given for the production of transparent aluminum nitride films in which the aluminum nitride films comprise a nomocrystal and are obtained by evaporation of ammine salts of aluminum iodide in an evaporation zone and subsequent ammonolysis in a decomposition zone at 380.degree. to 550.degree. C.

REFERENCES:
patent: 4095331 (1978-06-01), Rutz
patent: 4152182 (1979-05-01), Rutz
patent: 4172754 (1979-10-01), Dryburgh
G. A. Cox et al, "On The Preparation, Optical Properties and Electrical Behaviour of Aluminum Nitride", J. Phys. Chem. Solids, Pergamon Press 1967, vol. 28, pp. 543-548.
V. I. Myakinenkov et al, "Preparation of AIN", Inorganic Materials, vol. 10, No. 10, pp. 1635-1636, Oct. 1974 (Publ. Mar. (1975), Plenum Publishing Corporation.
George W. Watt et al, "The Ammoniation, Ammonolysis and Hydrolysis of Aluminum (III) Iodide", J. Am. Chem. Soc. 78 (1956), pp. 5494-5496.

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