Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Using mask
Reexamination Certificate
2006-08-15
2006-08-15
King, Roy (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Using mask
C205S684000
Reexamination Certificate
active
07090763
ABSTRACT:
Process for the production of shaped articles of niobium or tantalum by electrochemical etching of a niobium or tantalum sheet covered by a structured photoresist mask in an aqueous solution containing hydrofluoric acid, the etching being effected under electrochemical conditions under which strong noise is superposed on the etching current and the etching solution contains a water-soluble polymer.
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Red'kin et al, Electrochemical Etching of a Niobium Film through a Tin Nanomask Formed by AFM Tip-Induced Local Oxidation, Mar. 2003, MAIK Nauka Interperiodica, vol. 32, No. 2, pp. 88-90.
Petzow, Metallographic Etching, 1999, ASM International, pp. 80-89.
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Shtan'ko et al., Influence of Anodic Polarization on the Process of Anodic Dissolution of Tantalum, 1978, Vopr. Khim. Tekhnol., 80, p. 7-10.
M. Köhler in Ätzverfahren für die Mikrotechnik [Etching methods for microengineering], Wiley-VCH-Verlag (month unavailable) 1998, p. 306 , “Nb—Niob”.
G. Petzow, in Metallographisches, keramographisches, plastographisches Ätzen [Metallographic, Ceramographic, plastographic etching], Gebr. Borntraeger Verlag, 6th edition, (month unavailable) 1994, p. 99, “Refraktämetalle”.
Database WPI Section Ch, Week 198005 Derwent Publications Ltd., London, GB; XP002274520 & SU 662 624 A (As Latv Inorg Chem) 18. May 18, 1979.
Database CA 'Online! Chemical Abstracts Service, Columbus, Ohio, US; Kadaner, L. I. et al: “Solution for electrochemical polishing of niobium articles” XP002274518 gefunden im STN Database accession No. 96:76531 CA & Database WPI Section Ch, Week 198235 Derwent Publications Ltd., London, GB; AN 1982-74156E XP002274521 & SU 876 808 A (Khark Pedagogy Inst) 2. Nov. 2, 1981.
Database CA 'Online! Chemical Abstracts Service, Columbus, Ohio, US; Shtan'ko, V.M. et al: “Effect of anodic polarization on the anodic dissolution of tantalum” XP002274519 gefunden im STN Database accession No. 89:206298 Ca & Voprosy Khimii I Khimicheskoi Tekhnologii (1978), 50, 7-10, 1978.
Albert Mathias
Gottschling Marianne
Löffelholz Josua
Sadowski Günter
Alexander Michael P.
Gil Joseph C.
H. C. Starck GmbH
King Roy
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